Additional information
| Diameter | 2”, 3”, 4”, 5”, 6”, 8”, 12” |
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| Wafer Type | Standard, Ultrathin, Ultrathick |
| Finish | SSP, DSP |
| Shape | Standard, Custom shape |
| Thickness | 100+ (2”, 3”, 4”); 300+ (6”); 400+ (8”); 500+ (10”,12”) |
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| Product Properties | |
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| Product Name | Borofloat 33 Glass wafers |
| Description | These wafers have a clear, colorless and high-quality mirror-like surface with excellent optical properties. It has uniform thickness with low internal stress and is resistant to thermal shock. MSC offers high-quality wafers for applications like micro-optics, sensors, microlithography, semiconductors, lighting, and medical technology. |
| Wafer Thickness | Wafer thickness of 500 +/- 25µm is quite standard. |
| Availability | Prime wafers only |
| Size | Inch | 2” | 3” | 4” | 6” | 8” | 10” | 12” |
| Diameter | mm | 50.8 | 76.2 | 100 | 150 | 200 | 250 | 300 |
| Tolerance (+/-) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Thickness | µm | 100+ | 100+ | 100+ | 300+ | 400+ | 500+ | 500+ |
| Pri. Ref. Flat | mm | 32.5 | 32.5 | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5x5mm2) | µm | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 |
| TTV | µm | <2 | <2 | <2 | <3 | <3 | <5 | <5 |
| Bow | µm | +/-20 | +/-20 | +/-20 | +/-30 | +/-40 | +/-40 | +/-40 |
| Warp | µm | ≤30 | ≤30 | ≤30 | ≤40 | ≤50 | ≤50 | ≤50 |
| PLTV (5x5mm2)<0.4µm | % | ≥95% | ≥95 | ≥95 | ≥95 | ≥95 | ≥95 | ≥95 |
| Edge Rounding | mm | SEMI std. | SEMI std. | SEMI std. | SEMI std. | SEMI std. | SEMI std. | SEMI std. |
| Surface Type | NA | SSP/ DSP | SSP/ DSP | SSP/ DSP | SSP/ DSP | SSP/ DSP | SSP/ DSP | SSP/ DSP |
| Surface Roughness | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Diameter | 2”, 3”, 4”, 5”, 6”, 8”, 12” |
|---|---|
| Wafer Type | Standard, Ultrathin, Ultrathick |
| Finish | SSP, DSP |
| Shape | Standard, Custom shape |
| Thickness | 100+ (2”, 3”, 4”); 300+ (6”); 400+ (8”); 500+ (10”,12”) |