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KL 7000 Series, Positive photoresist

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Product Properties
Description KL7000 series are positive photoresists for use in i-line, g-line, and broadband applications. They offer high sensitivity, high resolution, and wide process latitude. The KL7000 system is engineered to contain no PFAS and no Fluorine-containing materials for environmental safety and demanding regulatory compliance.

  • Single coat coverage 0.15 – 3.0 µm
  • Designed for use with industry standard MIF and MIB developers; optimized for 0.26N TMAH
  • Achieve resolution 0.55 µm dense line/space and 0.40 µm isolated line
  • Competes with S1800™, AZ®1500, and other general use positive tone photoresist
Data Sheet Download link
Volumes & Customization
  • Sizes available: 100ml, 500ml, 1L, 4L
  • Production volumes available (>20G MTO)
  • Custom thicknesses and formulations are available by request
SKU: N/A Category:

Additional information

Type

KL7002, KL7005, KL7010, KL7015, KL7020
Size

100ml, 500ml, 1L, 4L/1Gal, 4x4L, >20G MTO

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