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KL 5300 Series, Positive Photoresist

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Product Properties
Description KL5300 series are positive photoresists for use in i-Line, g-Line, and broadband applications. They offer high sensitivity, high resolution, and excellent process latitude.

  • Cover 0.25 – 2.5 µm in a single coat
  • Designed for use with industry standard TMAH 0.26N developers
  • Achieve resolution 0.55 µm
  • Competes with S1805™, S1808™, S1811™, S1813™, S1818™
Volumes & Customization
  • Sizes available: 100ml sample, 500ml, 1L, 4L
  • Production volumes available (>20G)
  • Custom thicknesses and formulations are available by request
Data Sheet Download link
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Additional information

Type

5302, 5305, 5310, 5315
Size

100ml, 500ml, 1L, 4L/1Gal, 4x4L, Production

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