{"id":2061,"date":"2025-07-11T12:20:54","date_gmt":"2025-07-11T12:20:54","guid":{"rendered":"https:\/\/mansupplychain.com\/version\/?post_type=product&p=2061"},"modified":"2025-07-11T13:52:48","modified_gmt":"2025-07-11T13:52:48","slug":"harp-pmma-e-beam-series-positive-photoresist","status":"publish","type":"product","link":"https:\/\/mansupplychain.com\/version\/product\/harp-pmma-e-beam-series-positive-photoresist\/","title":{"rendered":"HARP PMMA e-Beam Series, Positive Photoresist"},"content":{"rendered":"","protected":false},"excerpt":{"rendered":"\n\n\n\n\n\n\n\n\n\n
Product Properties<\/th>\n<\/tr>\n<\/thead>\n
Description<\/td>\nHARP\u2122 PMMA (polymethyl methacrylate) e-Beam resist is designed for high resolution direct write e-Beam lithography. When combined with HARP-C\u2122 copolymer, the HARP multi-layer system is ideal for T-gate manufacture. HARP\u2122 PMMA has excellent adhesion to a wide variety of substrates, and is used as a protective coating layer for wafer thinning and sacrificial layers.<\/td>\n<\/tr>\n
Applications<\/td>\n\n
    \n
  • e-Beam direct write lithography<\/li>\n
  • Multi-layer T-gate manufacture<\/li>\n
  • X-Ray LIGA<\/li>\n
  • Protective Coating for wafer thinning<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n
Solvents<\/td>\nKemLab HARP\u2122 PMMA products are manufactured in safe solvents (anisole and ethyl lactate).<\/td>\n<\/tr>\n
Volumes & Customization<\/td>\n\n
    \n
  • Resist sizes available: 100ml, 500ml, 1L, 4L<\/li>\n
  • Developer sizes available: 4L, 4x4L (Case)<\/li>\n
  • Custom dilutions are available upon request<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n
Comparison of High-Resolution e-Beam Resists<\/td>\n\n
    \n
  • (a) 1000 HARP eB:<\/strong> Highest molecular weight (Mw) PMMA polymer, best resolution and contrast PMMA, manufactured in Anisole, competes with 950 PMMA.<\/li>\n
  • (b) 500 HARP eB:<\/strong> PMMA Polymer with mid-range Mw, faster throughput versus 1000 HARP eB, manufactured in Anisole, competes with 495 PMMA.<\/li>\n
  • (c) HARP-C:<\/strong> MMA\/MAA (methyl methacrylate\/methacrylic acid) copolymer, used in multi-layer process with PMMA, manufactured in Ethyl Lactate, competes with MMA(8.5)MAA.<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n
Data Sheet<\/td>\nDownload link<\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":2064,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[69],"product_tag":[],"class_list":["post-2061","product","type-product","status-publish","has-post-thumbnail","product_cat-e-beam-direct-write-photoresists","first","instock","shipping-taxable","product-type-variable"],"acf":[],"_links":{"self":[{"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/product\/2061","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/comments?post=2061"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/media\/2064"}],"wp:attachment":[{"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/media?parent=2061"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/product_brand?post=2061"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/product_cat?post=2061"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/mansupplychain.com\/version\/wp-json\/wp\/v2\/product_tag?post=2061"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}