Additional information
| Size | 1 Quart, 1 Gallon, 4×1 Gallon, 5 Gallon, 55 Gallon |
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| Product Properties | |
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| Product Name | Tantalum Nitride Etchant SIE-8607 |
| How do I increase the etch rate? | 1. The rate will approximately double with every 10°C increase in temperature. 2. Increase the rate of stirring or agitation. |
| How do I reduce the etch rate? | Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%. |
| Do I need to dilute the etchant? | No, it is ready to use. |
| How do I reduce undercutting? | Increase the rate of stirring or agitation. |
| Etch Rate at 25°C | 70–80 Å/sec |
| Storage Conditions | Ambient |
| Filtration | 0.2 μm |
| Recommended Operating Temperatures | 20–80°C (30–40°C most common) |
| Rinse | Deionized water |
| Photoresist Compatibility | KLT6000 Series, KLT 5300 Series, HARE SQ (SU-8 type), TRANSIST, or PKP-308PI |
| Select Compatible Materials | Au |
| Select Incompatible Materials | Oxide, nitride, Al, Si |
| Compatible Plastics | HDPE, PP, Teflon, PFA, PVC |
| Isotropy | Isotropic |
| Additional Information | — |
| SDS | Download SDS |
| Size | 1 Quart, 1 Gallon, 4×1 Gallon, 5 Gallon, 55 Gallon |
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