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Hexamethyldisilazane (HMDS) LM Solution

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Product Properties
Chemical Formula (CH3)3SiNHSi(CH3)3
Appearance Colorless liquid
Odor Pungent ammonia like odor
Density 0.77 g/cm³ @20°C
Boiling Point 125°C
Melting Point -80°C
Solubility Water reactive
Particle Count Very low metal (LM)/particle concentration (ppb) –
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Application Cleaning and etching in semiconductor manufacturing
Safety Data Sheet Download SDS
SKU: HMDS-1 Category:

Additional information

Size

1 Quart, 1 Gallon, 4×1 Gallon, 5 Gallon, 55 Gallon