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Buffered Oxide Etch (BOE) Solution, Any Ratio

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Product Properties
Description High purity HF etchants for thermally grown or deposited silicon dioxide films. Silicon dioxide etchants are ideal for semiconductor applications requiring minimal undercutting and broad compatibility. Buffered Oxide Etchants ship standard without surfactant. Non-PFAS surfactant added upon request.
Key Features Wide range of etch rates, High purity, Ready to use, Broad compatibility with photoresists
Chemical Formula BOE
Appearance Colorless liquid
Odor Acrid, pungent
Density 1.11 g/cm³ @20°C
Boiling Point 104°C
Melting Point -35°C
Solubility Completely miscible in water
Particle Count Learn more
Application Etching of thermally grown or deposited silicon dioxide in semiconductor manufacturing
Safety Data Sheet Download SDS
SKU: N/A Category:

Additional information

Size

1 Quart, 1 Gallon, 4×1 Gallon, 5 Gallon, 55 Gallon

Ratio

4:1, 5:1, 8:1, 9:1, 10:1, 20:1, 50:1, 100:1