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KL Image Reversal Series

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Product Properties
Description KL IR image reversal series of photoresists are used as either positive and negative photoresists in i-line, g-line, and broadband applications. As a negative resist, the KL IR series has excellent thermal stability and is optimized for metallization processes. Developed using standard 0.26N TMAH developers and KL Photoresist Remover or standard NMP removers.
KL IR LO 15 Designed for lift-off profiles when used as negative photoresist.
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KL IR 15 Designed for straight profiles when used as negative photoresist.
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Volumes & Customization
  • Sizes available: 100ml, 500ml, 1L, 4L
  • Production volumes available (>20G MTO)
  • Custom thicknesses and formulations are available by request
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Additional information

Type

IRLO, IR15

Size

100ml, 500ml, 1L, 4L/1Gal, 4x4L, Production